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Maintenance of vacuum coating equipment

Maintenance of vacuum coating equipment


If any machine wants to be used normally for a long time, it must be properly maintained, and the maintenance points of vacuum coating equipment need to do the following:

1. The vacuum coating machine should clean the workshop every time 200 coating procedures are completed.

The method is: repeatedly scrub the wall of the vacuum chamber with a saturated solution of caustic soda (NaOH) (note that the human skin cannot directly touch the caustic soda solution to avoid burns). The purpose is to make the coating material aluminum react with sodium hydroxide. After the reaction, the film fell off and released hydrogen gas. Then clean the vacuum chamber with clean water, and clean the dirt in the fine suction valve with a cloth moistened with gasoline.

2. If the diffusion pump has been used continuously for more than 6 months, the pump speed has slowed down significantly, or the operation is improper. Fill the atmosphere, remove the connecting water pipe, remove the electric stove plate, unscrew the nozzle once, clean the pump room and pump box with gasoline, then clean with detergent, and then thoroughly clean with clean water. After the water evaporates, install the pump box and add new diffusion pump oil, install the body, connect the water pipe, and install the electric stove plate to restart the machine. Pay attention to leak detection before restarting.

The method is: start the maintenance pump, close the door, and observe whether the vacuum degree of the diffusion pump reaches 6x10 PA after a few minutes, otherwise, perform a leak test. Check whether the sealing rubber ring is installed at the connection or whether the sealing ring is crushed. It is necessary to eliminate the hidden danger of air leakage before heating, otherwise the diffusion pump oil will burn the ring and cannot enter the working state.

3. When rough pumps (slide valve pumps, rotary vane pumps) work continuously for one month (half in the rainy season), the oil needs to be replaced.

The method is: unscrew the oil bolt, drain the old oil, and then start the pump for a few seconds to drain the old oil in the pump. Unscrew the oil return bolt and add new oil to the specified amount (observe with the oil sight glass). After continuous use for more than half a year, open the oil cap when changing the oil and wipe off the dirt in the tank with a cloth.

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