Maintenance and repair of the diffusion pump in the vacuum coating equipment
The diffusion pump in the vacuum coating equipment is a kind of high vacuum obtaining equipment, which is limited to 5-stage pump. The pumping speed and efficiency are high, and it can be extracted in a busy manner. It is commonly used in vacuum electroplating, high pumping speed and large equipment. The components are vacuumed by diffusion pump, most of which are large-scale equipment, so the cost will be higher. Therefore, most enterprises attach great importance to the maintenance and maintenance of the diffusion pump of the vacuum coating machine. The following collection of vacuum editors will introduce the maintenance and maintenance methods of the diffusion pump in detail:
First: the cooling water of the diffusion pump must be stable during the working process. After the heating is stopped, the cooling water is turned off after the working fluid of the pump is completely cooled.
Second: When the diffusion pump stops working, the pump should be kept in a vacuum state to avoid the deterioration of the pump oil.
Third: The gas to be pumped should be dry, non-corrosive and dust-free.
Fourth: If the diffusion pump is not in use temporarily, it should be kept in a vacuum state during storage to prevent the pump oil from contaminating and corroding various components, and blowing out the remaining water in the cooling water jacket. Keep room temperature between 10 and 40 degrees Celsius.
Fifth: The performance of the diffusion pump will gradually deteriorate after long-term work, and should be checked regularly. Such as: whether the pump oil is reduced or oxidized, refuel or replace it according to the corresponding requirements; the parts and pump cavity are first cleaned with aviation gasoline, then scrubbed with acetone, and dried at 80-100 degrees Celsius or dried with a hair dryer. After processing, assemble them in sequence, keep the pump core and the pump bottom vertical, the pump cavity is concentric, and the gaps of the nozzles at all levels should be adjusted according to the original requirements.
Sixth: After the water is volatilized and dried, install the pump core, add new diffusion pump oil, install it back to the body, connect the water pipe, and install the furnace plate to restart.
Seventh: Before restarting the vacuum coating machine, pay attention to leak detection. The method is: start the maintenance pump, close the door, observe the vacuum degree after a few minutes, and check whether the sealing rubber ring at the connection is leaking, or whether the sealing ring is broken. The hidden leak can be heated before it is eliminated, otherwise the oil of the diffusion pump will burn out and cannot enter the working state.
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