Main classification of grease adhered to parts of PVD vacuum coating equipment
The grease adhered to the parts of the pvd vacuum coating equipmentcan be divided into two types: animal and vegetable oils and mineral oils. Alkaline solution can be used to chemically remove animal and vegetable oil; organic solvents can be used to remove mineral oil.
An evacuation system of a vacuum coating machine includes an evacuation mechanism connected to a vacuum chamber through a pipeline, a vacuum detection mechanism and a PLC control system; the evacuation mechanism includes a mechanical pump, a first Roots pump, a second Roots pump and a diffuser Pump, wherein the mechanical pump, the first roots pump, and the second roots pump are connected to the vacuum chamber by pipelines in sequence to form a pre-exhaust air path from the pump body to the vacuum chamber. A roots pump and a diffusion pump are connected to the vacuum chamber through a pipeline to form a vacuum air path leading from the pump body to the vacuum chamber, and set on the pipeline between the first roots pump and the second roots pump There is a first valve, a second valve is provided on the pipeline between the first Roots pump and the diffusion pump, and a third valve is provided on the pipeline between the diffusion pump and the vacuum chamber; the second Roots pump is connected to The pipe between the vacuum chambers is provided with a venting pipe, on which a venting valve is installed; the diffusion pump is connected with a maintenance pump through the pipe; the vacuum detection mechanism includes a first vacuum gauge, a second vacuum gauge, and a third vacuum gauge. The vacuum gauge and the fourth vacuum gauge, wherein the first vacuum gauge is arranged on the pipeline between the vacuum chamber and the exhaust pipe, the second vacuum gauge is arranged on the pipeline between the maintenance pump and the diffusion pump, and the third vacuum gauge is connected with the first vacuum gauge. Four vacuum gauges are arranged on the pipeline between the vacuum chamber and the diffusion pump; the mechanical pump, the first roots pump, the second roots pump, the diffusion pump, the maintenance pump, the first valve, the second valve, and the third valve And the air release valve is respectively connected and controlled by the PLC control system; the first vacuum gauge, the second vacuum gauge, the third vacuum gauge, and the fourth vacuum gauge are respectively connected to the signal input end of the PLC control system; the diffusion pump It is equipped with a power regulator, and the power regulator is connected to and controlled by a PLC control system.
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