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Knowledge of vacuum coating equipment

Knowledge of vacuum coating equipment

2021-12-31

Knowledge of vacuum coating equipment






In the vacuum coating machine, the material that needs to be coated is called the substrate, and the coating material is called the target. The substrate and target are in a vacuum chamber. Evaporative coating usually means heating the target, evaporating surface components in the form of atomic groups or ions, and depositing on the surface of the substrate, and forming a thin film through a film forming process. This coating technology is evaporation coating technology.


For PVD sputtering coating, the vacuum coating machine can be simply understood as bombarding the target with electrons or high-energy lasers, sputtering surface components in the form of radicals or ions, and depositing on the surface of the substrate. After the film forming process, a thin film is formed. This coating technology is called magnetron sputtering coating technology.


The vacuum coating machine is composed of vacuum furnace body, vacuum pump, control cabinet, vacuum gauge, cooling system and other components. The vacuum donkey body can be made of stainless steel, carbon steel or a combination of them. According to the specific coating of the target material, what coating needs to be plated, what target material is used, or flushing related subgases to achieve the desired coating.


According to process requirements, choose vacuum coating machines of different specifications, including resistance evaporation vacuum coating equipment, electron beam evaporation vacuum coating equipment, magnetron sputtering vacuum coating equipment, ion plating vacuum coating equipment, magnetron reactive sputtering vacuum coating equipment, Hollow cathode ion plating and multi-arc ion plating, etc. The operation form of the fixture includes rotation, revolution and revolution + rotation. The user can put forward corresponding requirements according to the size and shape of the plate, as well as the speed range and accuracy of the rotation: ordinary adjustable and frequency conversion speed regulation, etc.


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