Okwu mmalite nke oghere vapor, sputtering na mkpuchi ion

Mkpuchi mkpuchi tumadi na-agụnye agụụ vapor deposition, sputtering mkpuchi na ion mkpuchi, niile nke a na-eji na-edebe dị iche iche metal na-abụghị metal film n'elu plastic akụkụ site distillation ma ọ bụ sputtering n'okpuru agụụ ọnọdụ, nke nwere ike nweta a dị gịrịgịrị elu mkpuchi na pụtara ìhè uru nke ngwa ngwa adhesion, ma price bụkwa elu, na ụdị nke ọla na-n'ozuzu na-arụ ọrụ nke nwere ike na-arụ ọrụ na-arụ ọrụ dị elu nke ọla na-arụ ọrụ na-erughị ala.
Ngwunye vapor Vacuum bụ usoro ikpo ọkụ metal n'okpuru oghere dị elu, na-eme ka ọ gbazee, kpochapu, ma mepụta ihe nkiri metal dị mkpa n'elu ihe nlele ahụ mgbe ọ dị jụụ, na ọkpụrụkpụ nke 0.8-1.2 um. Ọ na-ejupụta na obere akụkụ concave na convex dị n'elu nke ngwaahịa a kpụrụ iji nweta ihu igwe dị ka enyo. Mgbe a na-eme ka ikuku vapor na-arụ ọrụ ma ọ bụ iji nweta mmetụta enyo na-egbuke egbuke ma ọ bụ na-ekpochapụ ihe nchara na-eji obere ntanye dị ala, a ghaghị kpuchie elu ala.

Ịgbasa na-ezokarị aka na magnetron sputtering, nke bụ usoro ịgbasa ọkụ dị ala nke dị elu. Usoro na-achọ oghere nke banyere 1 × 10-3Torr, nke ahụ bụ 1.3 × 10-3Pa oghere steeti jupụtara na inert gas argon (Ar), na n'etiti plastic mkpụrụ (anode) na metal lekwasịrị anya (cathode) gbakwunyere elu voltaji kpọmkwem ugbu a, n'ihi na electron excitation nke inert gas eme site na-egbukepụ egbukepụ nke plasma ha na-agbawa, na-emepụta ihe na-agbawa na plasma. na plastic substrate. Ọtụtụ n'ime mkpuchi ọla n'ozuzu na-eji DC sputtering, ebe seramiiki na-adịghị eduzi na-eji RF AC sputtering.

Ihe mkpuchi ion bụ usoro nke a na-eji mwepu gas na-eme ka ionize gas ma ọ bụ ihe a na-ekpochapụ n'okpuru ọnọdụ ohere, na ihe na-ekpochapụ ma ọ bụ ihe na-emeghachi ya na-edobe na mkpụrụ site na bọmbụ nke ion gas ma ọ bụ ion nke ihe a kpochapuru. Ndị a na-agụnye mkpuchi magnetron sputtering ion mkpuchi, mkpuchi reactive ion mkpuchi, oghere cathode mwepu ion mkpuchi (usoro oghere cathode vepor deposition), na mkpuchi multi-arc ion (nkpuchi cathode arc ion).

Magnetron nwere akụkụ kwụ ọtọ na-efesa mkpuchi na-aga n'ihu n'ahịrị
Enwere ike iji ngwa ngwa zuru oke, maka ngwaahịa eletrọnịkị dị ka oyi akwa mkpuchi shei EMI, ngwaahịa dị larịị, na ngwaahịa iko oriọna niile n'ime nkọwapụta dị elu nwere ike imepụta. Ikike ibu ibu, kọmpat clamping na staggered clamping nke conical ìhè iko maka mkpuchi ihu abụọ, nke nwere ike ibu ibu ibu ikike. Ọdịmma kwụsiri ike, ịdị mma nke oyi akwa ihe nkiri sitere na ogbe ruo na ogbe. Ọkwa dị elu nke akpaaka yana ọnụ ala ọrụ na-agba ọsọ.

–E wepụtara akụkọ aonye na-emepụta igwe mkpuchi ikukuGuangdong Zhenhua