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How to clean the tungsten wire of the pvd evaporation coating equipment?

How to clean the tungsten wire of the pvd evaporation coating equipment?

2021-03-18

How to clean the tungsten wire of the pvd evaporation coating equipment?

 

The Vacuum evaporation coating equipment can be divided into resistance evaporation coating, electron beam evaporation coating, high frequency induction heating evaporation coating, arc heating evaporation coating, etc. according to different evaporation sources. Among them, resistance evaporation coating is the most widely used one, and its resistance evaporation The source is usually made of tungsten, molybdenum, and tantalum.

 

1. Tungsten wire and thin tungsten rod cleaning method (the same method for molybdenum wire and tungsten-molybdenum alloy wire)

 

Trichloroethylene degreasing 3min~10min (twice), take it out and dry it, boil it in 20% sodium hydroxide (NaOH) solution for 15min~20min (to make the graphite layer fall off), wash with tap water, neutralize in 2%~5% ammonia water , Wash with tap water, boil in deionized water twice (10min~15min each time), dehydrate with absolute ethanol, and dry.

 

2. Electrolytic cleaning of tungsten rod (thick tungsten wire) (the electrolytic cleaning of aluminum is the same as this method)

 

Put the parts in a 20% sodium hydroxide (NaOH) solution, use graphite and parts as electrodes, and electrolyze and clean them with AC power for about 30 seconds (the solution can be reused), then rinse with hot water, rinse with deionized water, and dry.

 

3. Weak erosion of tungsten parts

 

The sodium nitrite (NaNO₂) is melted in the iron vortex, and then the parts are quickly etched in the sodium nitrate melt (for no more than 1s), and washed and dried in boiling water, running water and absolute ethanol in turns.

 

4. Strong corrosion of tungsten parts

 

(1) Formula: potassium iron oxide (K₃Fe(CN)) 6.15g, sodium hydroxide (NaOH) 1000g, deionized water 1000mL.

 

(2) Method: Immerse the parts in a solution with a temperature of 70°C (time 0.5h~2h), rinse with hot water and quickly rinse and dry in 50% hydrochloric acid solution and hot water.



PVD vaccum coating equipment/evaporation coating machine/PVD vaccum coating equipment/evaporation coating machine

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