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Horizontal continuous magnetron coating line

Horizontal continuous magnetron coating line

2020-07-02

Horizontal continuous magnetron coating line

The horizontal continuous magnetron coating line is composed of seven independent vacuum chambers, with one coating chamber which are equipped with an ion cleaning and heating function. Vacuum isolation of vacuum pumping system adopts independent door valve, and vacuum isolation is very reliable. The vacuum chamber adopts the building block structure, and the coating chamber can be expanded according to the function.


vacuum coating machine

Continuous magnetron coating production line


Cavity structure: the use of efficient horizontal continuous magnetic control coating line, equipped with front and rear rough pumping room, front and rear transition room, front and rear fine pumping room, front and rear buffer room, color plating room.


Target design: A new type of rotating cathode target and a flat cathode target are used.


Power supply configuration: equipped with high power medium frequency magnetron sputtering power supply


Transmission system: roller drive, variable frequency adjustable, inductive door opening system.


Vacuum system: diffusion pump (molecular pump) + roots pump + mechanical pump + cryogenic pump


Can be coated glass or flat plate, the size can be customized


The production line adopts advanced plug-in valves for chamber partition, which can achieve effective partition and stabilize the process gas.


The production line adopts a uniform intake pipe structure design, and the air injection is even and smooth;


Electrical control: The production line adopts PLC full process control, fast production cycle, and is equipped with an industrial computer display system.


Man-machine dialogue: The control system can realize man-machine dialogue, timely necessary intervention in the production process. During the operation, there are alarm prompts and fault displays. The fault display can prompt the operator for correct operation and troubleshooting.


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