Lub tshuab nqus tsev txheej tshuab ntawm lub twj tso kua mis muaj cov hauv qab no cov cai:
(1) Lub tshuab nqus tsev txheej txheej yuav tsum muaj lub tshuab nqus tsev loj txaus, uas yuav tsum tsis txhob tso cov pa tawm sai sai ntawm cov khoom siv hauv qab thiab cov khoom siv evaporated thiab cov khoom hauv lub tshuab nqus tsev thaum txheej txheej txheej txheej, tab sis kuj tseem tuaj yeem nqus cov pa tawm sai sai ntawm cov txheej txheem sputtering thiab ion txheej txheem, nrog rau cov pa tawm ntawm cov txheej txheem coatings thiab coatings.
Cov pa paug thaum lub sij hawm sputtering thiab ion txheej txheej txheem kuj tuaj yeem muab tshem tawm sai. Txhawm rau txhim kho kev tsim khoom ntawm lub tshuab txheej, nws yuav tsum muaj peev xwm ua haujlwm sai.
(2) Lub tshuab nqus tsev qhov kawg ntawm cov txheej tshuab siv lub tshuab yuav tsum sib txawv raws li qhov yuav tsum tau ua ntawm cov yeeb yaj kiab sib txawv. Table 7-9 yog qhov ntau ntawm lub tshuab nqus tsev kawm ntawv uas xav tau los ntawm txheej txheej txheej ntawm cov yeeb yaj kiab sib txawv.
(3) Nyob rau hauv cov roj diffusion twj tso kua mis raws li lub ntsiab twj tso kua mis twj tso kua mis yuav tsum tau lub twj tso kua mis cov roj rov qab tus nqi yog tsawg npaum li sai tau, vim hais tias cov rov qab roj vapor yuav ua paug rau saum npoo ntawm lub workpiece thiab ua rau qhov zoo ntawm cov zaj duab xis poob. Nyob rau hauv zaj duab xis zoo yuav tsum tau tshwj xeeb tshaj yog nyob rau hauv txheej txheej txheej, nws yog qhov zoo tshaj plaws los siv cov roj-dawb twj tso kua mis. Thaum siv roj diffusion twj tso kua mis twj tso kua mis, yuav tsum tau muab tso rau hauv lub twj tso kua mis inlet adsorption ntxiab, txias ntxiab thiab lwm yam khoom, thiab yuav tsum tau xyuam xim rau cov conductivity ntawm lub Cheebtsam kom paub meej tias lub tshuab nqus tsev vacuum tswj lub siab tshaj plaws kev ceev ceev.
(4) Tus nqi xau ntawm lub tshuab nqus tsev txheej chamber thiab nws cov twj tso kua mis yuav tsum yog me me, piv txwv li, txawm tias nws yog cov pa paug tawm, nws yuav cuam tshuam rau qhov zoo ntawm cov yeeb yaj kiab. Yog li ntawd, txhawm rau kom ntseeg tau tias kev sib khi ua haujlwm ntawm lub kaw lus, tag nrho cov xau ntawm qhov system yuav tsum raug txwv rau qhov kev tso cai.
(5) Lub tshuab nqus tsev ua haujlwm, siv thiab tu yuav tsum yooj yim, ruaj khov thiab txhim khu kev qha.
– Zaj lus no yog tso tawm los ntawmtshuab nqus tsev txheej tshuab manufacturersGuangdong Zhenhua
Post lub sij hawm: Dec-14-2023