Nā loina hana ʻenehana CVD

Hoʻokumu ʻia ka ʻenehana CVD i ka hopena kemika. ʻO ka pane i loko o ke kinoea a ʻo kekahi o nā huahana i loko o ke kūlana paʻa i kapa ʻia ʻo CVD reaction, no laila e hoʻokō kāna ʻōnaehana kemika i nā kūlana ʻekolu.

(1) Ma ka wela o ka waiho ʻana, pono e loaʻa i nā reactants kahi kaomi mahu kiʻekiʻe. Inā he kinoea nā reactants a pau i ka lumi wela, ua maʻalahi ka deposition, inā he liʻiliʻi loa nā reactants i ka lumi wela, pono e hoʻomehana ʻia e hoʻokaʻawale, a i kekahi manawa pono e hoʻohana i ke kinoea lawe e lawe mai i ke keʻena pane.
(2) No nā huahana hopena, pono nā mea a pau i loko o ke kinoea koe wale no ka waiho ʻana i makemake ʻia, aia ma ke ʻano paʻa.
(3) Pono e haʻahaʻa loa ke kaomi mahu o ke kiʻiʻoniʻoni i waiho ʻia e hōʻoia i ka paʻa paʻa ʻana o ke kiʻiʻoniʻoni i waiho ʻia i kahi substrate i loaʻa kahi mahana deposition i ka wā o ka hoʻoneʻe ʻana. Pono nō hoʻi e haʻahaʻa loa ke kaomi mahu o ka mea substrate i ka mahana waiho ʻana.
Ua māhele ʻia ka deposition reactants i ʻekolu mau mokuʻāina nui.
(1) Kūlana kinoea. ʻO nā kumu kumu i kinoea ma ka lumi wela, e like me ka methane, carbon dioxide, ammonia, chlorine, a me nā mea ʻē aʻe, ʻoi aku ka maikaʻi o ka hoʻoheheʻe ʻana i ka mahu, a no laila e maʻalahi ka hoʻoponopono ʻana i ke kahe.
(2) Waiwai. Hiki ke hoʻohana ʻia kekahi mau mea hopena i ka lumi wela a i ʻole ka wela iki aʻe, aia ke kaomi mahu kiʻekiʻe, e like me TiCI4, SiCl4, CH3SiCl3, a me nā mea ʻē aʻe, hiki ke hoʻohana ʻia e lawe i ke kinoea (e like me H2, N2, Ar) e kahe ma ka ʻili o ka wai a i ʻole ka wai i loko o ka ʻōpū, a laila e lawe i nā mahu momona o ka mea i loko o ke keena.
(3) Kūlana paʻa. I ka loaʻa ʻole o kahi kumu kinoea a wai kūpono paha, hiki ke hoʻohana ʻia nā meaʻai paʻa paʻa wale nō. Hiki ke lawe ʻia i loko o ke keena me ka hoʻohana ʻana i ke kinoea lawe lawe i loko o ka papa kiʻiʻoniʻoni.
ʻO ke ʻano kūlana maʻamau ma o kekahi kinoea a me ke kumu kumu kinoea-solid a i ʻole kinoea-wai, ka hoʻokumu ʻana i nā ʻāpana kinoea kūpono i ka hāʻawi ʻana i ke keena. No ka laʻana, hana ke kinoea HCl a me ka metala Ga e hana i ka mea kinoea GaCl, i lawe ʻia i ke keena ma ke ʻano o GaCl.

-Ua hoʻokuʻu ʻia kēia ʻatikala emea hana mīkini hoʻopaʻa haʻahaʻaGuangdong Zhenhua