Vacuum shafi yafi hada da injin tururi jijiya, sputtering shafi da ion shafi, duk abin da ake amfani da su saka daban-daban karfe da kuma wadanda ba karfe fina-finai a kan saman filastik sassa ta distillation ko sputtering karkashin injin yanayi, wanda zai iya samun wani bakin ciki surface shafi tare da fice amfani da sauri mannewa, amma farashin shi ne kuma mafi girma, da kuma shafi iri na kayayyakin aiki kasa da kasa aiki, kuma za a iya amfani da shafi iri na karafa aiki kasa da matakin.
Matsakaicin tururi hanya ce ta dumama ƙarfe a ƙarƙashin babban injin, sanya shi narke, ƙafe, da samar da fim ɗin ƙarfe na bakin ciki a saman samfurin bayan sanyaya, tare da kauri na 0.8-1.2 um. Yana cika cikin ƙananan ƙananan sassa da ƙananan sassa a saman samfurin da aka kafa don samun nau'i-nau'i-kamar madubi.Lokacin da aka yi amfani da tururi mai banƙyama ko dai don samun tasirin madubi mai nunawa ko don zubar da karfe tare da ƙananan mannewa, dole ne a rufe saman ƙasa.
Sputtering yawanci yana nufin sputtering magnetron, wanda shine hanya mai saurin zafi mai sauri. Tsarin yana buƙatar injin kusan 1 × 10-3Torr, wato 1.3 × 10-3Pa vacuum state cike da inert gas argon (Ar), kuma tsakanin roba substrate (anode) da karfe manufa (cathode) da high-ƙarfin wutar lantarki kai tsaye halin yanzu, saboda da electron excitation na inert iskar gas da aka samar ta hanyar haske da manufa, za ta haifar da fashewar ƙarfe na plasma. a kan roba substrate. Yawancin kayan aikin ƙarfe na gabaɗaya suna amfani da sputtering DC, yayin da kayan yumbu marasa ƙarfi suna amfani da sputtering RF AC.
Ion shafi wata hanya ce da ake amfani da fitar da iskar gas don yin juzu'i na ionize iskar gas ko abin da aka ƙafe a ƙarƙashin yanayi mara kyau, kuma abin da ya ƙafe ko na'urar amsawa ana ajiye shi akan ma'aunin ta hanyar bama-bamai na ions ko ions na abubuwan da aka ƙafe. Waɗannan sun haɗa da suturar ion magnetron sputtering ion, murfin ion mai amsawa, murfin cathode sallamar ion mai zurfi (hanyar ajiyar tururi mai fa'ida), da murfin ion da yawa (rufin cathode arc ion).
A tsaye magnetron mai gefe biyu sputtering ci gaba da shafi a layi
Za'a iya amfani da fa'ida, don samfuran lantarki kamar littafin kariya na harsashi EMI, samfuran lebur, har ma da duk samfuran kofi na fitila a cikin takamaiman takamaiman tsayi. Babban ƙarfin lodi, ƙarami mai ɗorewa da matse kofuna masu haske na conical don shafi mai gefe biyu, wanda zai iya samun ƙarfin lodi mai girma. Ingancin kwanciyar hankali, daidaito mai kyau na fim ɗin fim daga tsari zuwa tsari. Babban digiri na atomatik da ƙananan farashin aiki.
–Wannan labarin ya fito dagainjin shafa injin injinGuangdong Zhenhua
Lokacin aikawa: Janairu-23-2025