Fasahar CVD ta dogara ne akan halayen sinadarai. A dauki a cikin abin da reactants ne a cikin gaseous yanayi da kuma daya daga cikin kayayyakin da ke a cikin m jihar yawanci ake magana a kai a matsayin CVD dauki, don haka da sinadaran dauki dole ne cika wadannan uku yanayi.
(1) A deposition zafin jiki, da reactants dole ne a sami isasshen high tururi matsa lamba. Idan reactants duk gas ne a yanayin zafin jiki, na'urar da aka ajiye tana da sauƙi mai sauƙi, idan masu amsawa suna canzawa a yanayin zafin jiki kaɗan ne, yana buƙatar mai zafi don yin juzu'i, wani lokacin kuma yana buƙatar amfani da iskar gas don kawo shi zuwa ɗakin amsawa.
(2) Daga cikin samfuran amsawa, duk abubuwan dole ne su kasance a cikin yanayin gas sai dai ajiyar da ake so, wanda ke cikin ƙasa mai ƙarfi.
(3) Matsin tururi na fim ɗin da aka ajiye ya kamata ya zama ƙasa kaɗan don tabbatar da cewa fim ɗin da aka ajiye yana da ƙarfi a haɗe zuwa wani abu mai ƙayyadaddun zafin jiki a yayin ɗaukar jigo. Matsin tururi na kayan da ke ƙasa a wurin zafin jiki dole ne ya kasance ƙasa da ƙasa.
The deposition reactants sun kasu zuwa wadannan uku manyan jihohi.
(1) Jihar Gaseous. Kayayyakin tushen da ke da iskar gas a cikin daki, irin su methane, carbon dioxide, ammonia, chlorine, da sauransu, wadanda suka fi dacewa da tururin sinadarai, kuma ana iya daidaita yawan kwararar ruwa.
(2) Ruwa. Wasu sinadarai masu amsawa a cikin zafin jiki ko kuma zafin jiki dan kadan, akwai matsanancin tururi, irin su TiCI4, SiCl4, CH3SiCl3, da sauransu, ana iya amfani da su don ɗaukar iskar gas (kamar H2, N2, Ar) ta cikin saman ruwa ko ruwan da ke cikin kumfa, sannan a ɗauka da cikakken tururi na abun cikin ɗakin studio.
(3) Matsayi mai ƙarfi. Idan babu tushen iskar gas ko ruwa mai dacewa, ana iya amfani da kayan abinci mai ƙarfi kawai. Wasu abubuwa ko mahallin su a cikin ɗaruruwan digiri suna da matsananciyar tururi, kamar TaCl5, Nbcl5, ZrCl4, da sauransu, ana iya ɗaukar su cikin ɗakin studio ta amfani da iskar gas ɗin da aka saka a cikin fim ɗin fim.
Mafi na kowa halin da ake ciki nau'in ta wani gas da tushen abu gas-m ko gas-ruwa dauki, samuwar dace gaseous sassa zuwa studio bayarwa. Misali, HCl gas da karfe Ga suna amsawa don samar da gaseous bangaren GaCl, wanda ake jigilar shi zuwa ɗakin studio a cikin hanyar GaCl.
–Wannan labarin ya fito dagainjin shafa injin injinGuangdong Zhenhua
Lokacin aikawa: Nuwamba-16-2023