Factors of Uneven Film Coating of Magnetic Sputtering Vacuum Coating Machine
Now there are various types of vacuum coating equipment on the market. No matter what kind of vacuum coating machine, as long as the use is not professional enough, the uniformity of the coating film will be affected by some factors. Below, we will analyze the factors of uneven film formation with a magnetic sputtering vacuum coater.
Uneven air extraction from the coating machine will affect the uniformity of the coating. It is important that the substrate is clean. Before vacuum coating, the surface of the substrate must be carefully cleaned to achieve the purpose of degreasing, decontamination and dehydration of the workpiece. Substrate surface contamination is from various dust, grease, polishing paste, sweat stains, etc. attached to the parts during processing and transportation. In a humid environment, the substrate surface is easy to oxidize, forming an oxide film to adsorb gas. These dirts can be cleaned by degreasing or chemical methods. The clean substrate should not be placed directly outside, it needs to be stored in a closed container to reduce contamination. Dust will accumulate in the coating room, so it is necessary to clean the coating room, bake and degas, and place the machine in a clean environment. Pay attention to the oil return of the diffusion pump. There are many raw materials for coating, such as resin, silicone, silicon hydrochloric acid, polymer, etc. The ratio of auxiliary materials and formulas is different, and the film is also different.
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