Diffusion pump is one of the main tools for PVD vacuum coating machine to obtain high vacuum
Diffusion pump is one of the main tools for PVD vacuum coating machine to obtain high vacuum. They are simple to operate, have no moving parts, are relatively cheap, and maintain little and easy. But even so, there are some caveats when using a diffusion pump. Here are 12 things that vacuum furnace users should avoid when using a diffusion pump.
GIMS: Gas Ion Source Enhanced Magnetron Sputter, a gas ion source enhanced magnetron sputtering technology, divided into two types: Focus GIMS and Separate GIMS.
The role of ion source:
1, plasma cleaning
2, ionization reaction gas
3, auxiliary deposition
4, inhibit target poisoning
5. Post-ion oxidation treatment
The gas ion source ionizes and distributes the reactive gas. Under the action of the electric field of the ion source power supply, a large number of gas ions gain kinetic energy (temperature) and fly to the surface of the workpiece, causing bombardment, thereby effectively enhancing the reactive ions of magnetron sputtering Coating effect. In the process of reactive coating, gas ions bombard the surface of the workpiece, and unstable ions on the surface are bombarded, and the film structure is "tamped", making it denser and smoother.
This technology has been applied to diamond-like carbon (DLC) coatings and achieved very good results.
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