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Description of resistance evaporation method of PVD evaporation coating machine

Description of resistance evaporation method of PVD evaporation coating machine

2021-07-25

Description of resistance evaporation method of PVD evaporation coating machine




evaporation coationg machine



The evaporation system of the evaporation coating machine mainly refers to the film forming device. There are many film forming devices in the coating machine, including resistance heating, electron gun evaporation, magnetron sputtering, radio frequency sputtering, ion plating and other methods. I will talk about resistance heating and electron gun Two methods of evaporation are introduced, because I use these two methods more. According to its structure and working principle, the resistance evaporation of the evaporative vacuum coating machine is the most widely used and widely used evaporation method, and it is also the evaporation method with the longest application time.


The working method of the evaporation system of the evaporation coating machine is to make the tungsten sheet into a boat shape, and then install it between the two electrodes, add medicinal materials in the center of the tungsten boat, and then slowly energize the electrodes, the current flows through the tungsten boat, and the tungsten boat is energized to generate heat These low voltages and high currents make the tungsten boat with high melting point generate heat, which is then transferred to the coating material. When the heat of the tungsten boat is higher than the melting point of the coating material, the material will sublimate or evaporate. This method is easy to operate and simple in structure. , The cost is low, so it is used by many equipment, but the evaporated film is not dense enough, and many materials cannot be evaporated in this way, so it has certain limitations. When the tungsten boat evaporates the coating material, the melting point of the material must be lower than the melting point of the tungsten boat, otherwise there is no way to proceed.


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