Coating technology of vacuum coating machine
The coating technology of the vacuum coating machine is one of the main techniques for preparing thin film materials. It refers to the use of physical methods to vaporize a certain substance surface into gaseous atoms, molecules or partial ionization into ions in a vacuum state, and pass low-pressure gas (or Plasma) process, the technology of depositing a thin film material with a certain special function on the surface of the substrate material. Under vacuum coating technology, the substances used to prepare thin film materials are collectively referred to as vacuum coating materials.
However, the ion plating process is different. Although it is also carried out in a vacuum hood, the coating process is realized in the form of charge transfer. That is to say, the particles of the evaporated material act as positively charged high-energy ions, which are injected into the surface of the workpiece at a high speed under the attraction of the high-voltage cathode (ie, the workpiece). It is equivalent to a high-speed bullet, which can penetrate deeply into the substrate and form a solidly adhered diffusion coating on the workpiece. The technological process of ion plating is as follows: the evaporation source is connected with the anode, and the workpiece is connected with the cathode. When a high voltage direct current of 3 to 5 kilovolts is applied, an arc discharge is generated between the evaporation source and the workpiece.
Since the vacuum cover is filled with inert argon, part of the argon is ionized under the action of the discharge electric field, thereby forming a plasma dark zone around the cathode workpiece. The positively charged argon ions are attracted by the negative high voltage of the cathode and violently bombard the surface of the workpiece, causing particles and dirt on the surface of the workpiece to splash out, so that the surface of the workpiece to be plated can be fully cleaned by ion bombardment. Then, the AC power supply of the evaporation source is connected, and the evaporation material particles melt and evaporate, and enter the glow discharge area for ionization. Under the attraction of the cathode, the positively charged evaporation material ions and argon ions rush toward the workpiece. When the number of evaporating material ions on the surface of the workpiece exceeds the number of splashing ions, they will gradually accumulate to form a coating firmly attached to the surface of the workpiece. This is a simple process of ion plating.
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