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Aluminum has been used to make vacuum devices (accelerators, etc.) in large vacuum coating machines

Aluminum has been used to make vacuum devices (accelerators, etc.) in large vacuum coating machines

2021-01-10

Aluminum has been used to make vacuum devices (accelerators, etc.) in large vacuum coating machines


PVD vacuum coating machine


Aluminum has been used to make large vacuum devices (accelerators, etc.). However, aluminum has many shortcomings, such as porosity, containing more gas, low high-temperature strength, and relatively difficult to weld, so it has great limitations when used as a vacuum container. However, the permeability of aluminum to hydrogen at room temperature is about 10⁻⁻⁷ of 300 series stainless steel, so a 10µm thick aluminum film is deposited on stainless steel, which reduces the outgassing of hydrogen permeation by 10⁵ times. Aluminum composite on stainless steel can be used as electron tube electrode material. As long as full attention is paid to smelting and forging, aluminum is expected to become a material for the high vacuum system of vapor deposition machines.






Background technique:


Vacuum coating machine mainly refers to a kind of equipment that coats workpieces under high vacuum. Among them, there are many types of coating technologies, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, etc. . The main idea is divided into evaporation and sputtering. The object that needs to be coated is called the workpiece (or substrate), and the material that needs to be coated on the workpiece is called the target, such as a silicon target, a niobium target, an aluminum target, and a titanium target. The workpiece and the target are in the same vacuum chamber. Under vacuum conditions, argon gas at a certain pressure is introduced. The argon gas is ionized into argon ions under the action of a high voltage (300-800V) electric field. The argon ions accelerate the bombardment of the target material, thereby sputtering the target material onto the surface of the workpiece, forming film. However, the general coating machine cannot perform circular orbit coating, so the coating time is very long, and the coating efficiency cannot be improved; and the general coating machine is not equipped with a collection device, which causes a great waste of materials. Therefore, it is necessary to invent a rotary vacuum coating machine to solve the above problems.


Technical realization elements:


The purpose of the present invention is to provide a rotary vacuum coating machine to solve the problems raised in the background art.


In order to achieve the above-mentioned object, the present invention provides the following technical solutions: a rotary vacuum coating machine, including a main body of the coating machine, a guide protrusion is provided at the bottom of the inner cavity of the main body of the coating machine, and The bottom edge of the cavity is provided with a collection tank, the side wall of the coating machine main body is provided with an electronically controlled slide rail, the electronically controlled slide rail is connected with the movable nozzle through a connecting pipe, and the end side wall of the coating machine main body is provided with An annular empty groove, the annular empty groove is located above the electronically controlled slide rail, a movable plate is arranged in the annular empty groove, the movable plate is connected to the electronically controlled slide rail by an L-shaped connecting rod, and the movable plate is fixed A containment box is installed, the bottom of the containment box is provided with a circulation tube, the end of the loop tube away from the containment box is inserted into the collection tank, the top of the coating machine main body is provided with a cover plate, and the middle of the bottom end of the cover plate A connecting block is provided, the bottom of the connecting block is provided with a fixing plate, the inner side of the fixing plate is provided with a bonding plate, one end of the bonding plate close to the fixing plate is provided with a communicating tube, and one end of the communicating tube away from the bonding plate It penetrates the fixing plate and is fixedly connected to the bonding block, the outer side of the bonding block is bonded with spraying material, the middle of the connecting block is provided with an air extraction device, and the bottom of the air extraction device is connected to a communication tube through a vent pipe Connected, a solenoid valve is provided on the top of the air extraction device, an air outlet is provided on the top of the solenoid valve, the air outlet is located in a cover plate, and a vacuum pump connection pipe is provided on one side of the cover plate.


Preferably, the movable spray head and the connecting pipe are connected by a pin shaft, and a micro motor is provided on the pin shaft.


Preferably, the bottom of the movable plate is provided with balls, and the bottom of the balls is located in the annular slide at the bottom of the empty groove.


Preferably, there are a plurality of said fixing plates, and the plurality of fixing plates are distributed in a circular array.


Preferably, the spraying material has an annular structure, and the fixing plate, the connecting pipe and the bonding block are all located inside the spraying material.


Preferably, an elastic connecting layer is provided on the outer side of the bonding block, the elastic connecting layer is bonded and connected to the inner side of the sprayed material, and the elastic connecting layer is provided with air holes.


The technical effect and advantages of the utility model: The utility model is equipped with an electric control slide rail and a movable plate in the main body of the coating machine, so that the movable nozzle can perform coating work on the sprayed material while moving in a circular orbit, which improves the device The working efficiency of the coating machine is provided at the bottom of the main body of the coating machine. The dripping spray material can be collected and reused through the circulation pipe, which improves the utilization rate of the material; the air extraction device on the cover plate passes through the air pipe, the connecting pipe and the sticker The combined block can adsorb and fix the spraying material, making the spraying material easy to fix and replace, and further improve the working efficiency of the device.


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