Advantages of vacuum coating equipment after improving the coating structure of surface layer
The vacuum coating equipment improves the coating structure of the surface layer. The advantages are as follows: (1) it reduces the total area with relatively small tissue diameter and increases the total number of workpieces carrying plated parts; (2) The total number of relative parts is increased, the productivity is improved, the accuracy of plastic film supervision is improved, and the provisions on the hardware system are reduced. The system software is easy to complete the automatic control system. Defect: the diameter of the structure is relatively small and long (989 × 370), damaging its strength and flexural stiffness; Because the structure is exposed to the high-pressure gas chamber of high-temperature magnetron sputtering wear-resistant materials, its rotation stability and operation flexibility are damaged, the consistency of repeatedly rotating parts is weak, and maintenance and cleaning are often time-consuming.
In the development trend of vacuum coating machine, vacuum coating machine plays the role of carrying multiple films in optical coating machine. The number of stacked layers of optical films is limited due to the small number of plates carried. The reasonable area of the film is small, the loop adjustment is inconvenient, and the frequency stability of the optical signal is poor, which seriously affects the quality of the optical film. According to the regulations of surface coating products, the current vacuum coating machine is relatively fragmented, which can not meet the requirements of contemporary electronic optics for surface coating of 30 multi-layer high-precision optical films. In view of the shortcomings of the current technical level and the advantages and disadvantages of the above two relative thin plate structures, a new surface coating is specified, independent innovation is made, and a new generation of relative thin plate structure is optimized. The equipment realization: simple structure; Relatively easy to carry; Repeated precise positioning; High stability; Low production cost.
The vacuum coating machine adopts multi rotating plate support equipment, which can exchange tissue, rotary sealing tissue and exchange pushing tissue, as shown in Figure 3.
Exchange and promote the organization to be fixed on the website. The casting coating equipment shells 4 and 9 are fixed by the motor, the active driving gear, the driven gear (7 and 8) and the precision positioning plate (6). The driven gear 7 and the precision positioning plate (6) are fixed on the shaft 1. The precision positioning plate (6) obtains three double slots on average, and the grooved optical coupling 17 receives the optical signal in the slot to control the rotation and termination of the motor.
The rotary sealing feeding structure is composed of Wilson sealing mechanism 5 and bearing 2 with valve seat. Fixed cylinders 3 with seats are pasted on both sides of the support 2 and fixed on the cast-in-situ plate 4 of the coating equipment shell. The transport switching mechanism is composed of a rotating disc 15, a support disc 16, a suspension disc 14 and a comparison disc storage barrel 13. The rotating shaft 11 is connected by the rotary table 15, the rotating shaft 11 is connected according to the coupling 10, and the seal of the rotating shaft 1 is sent to the tissue.
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