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About leak detection of vacuum coating machine

About leak detection of vacuum coating machine

2020-09-19

About leak detection of vacuum coating machine


PVD vacuum coating machine


Checking the air leakage of vacuum coating machine is a method to check the vacuum degree of vacuum coating machine, which is called leak detection for short. As the vacuum level will directly affect the coating effect, so leak detection is essential. In general, air leakage in vacuum chamber is generated from some small holes in the chamber wall or the joints between the components. When the air extraction system draws air, the pressure in the vacuum chamber will decrease. The pressure difference between the outside and the inside will make the gas flow from the outside with high pressure to the vacuum chamber with low pressure, resulting in the decrease of the vacuum degree.






In order to achieve the purpose of the above utility model, the utility model provides an aluminum oxide vacuum coating machine, which includes: a vacuum box, a coating drum, a baffle, a nitrogen delivery mechanism, an oxygen delivery mechanism, and an aluminum source;


The coating drum, baffle, nitrogen delivery mechanism, oxygen delivery mechanism and aluminum source are located inside the vacuum box. The baffles are distributed on both sides of the coating drum, and the coating drum is partially blocked from both sides. The space between the plates extends, the aluminum source is located below the coating drum, the space between the aluminum source and the coating drum forms an evaporation space, the nitrogen delivery mechanism has a nitrogen delivery port, and the oxygen The conveying mechanism has an oxygen conveying port, and the nitrogen conveying port and the oxygen conveying port are arranged toward the vapor deposition space.


As an improvement of the aluminum oxide vacuum coating machine of the present invention, there is a gap between the coating drum and the baffles on both sides, and the size of the gap is larger than the thickness of the substrate wound on the coating drum and the coating layer on the substrate Sum.


  As an improvement of the aluminum oxide vacuum coating machine of the present invention, the substrate is a plastic substrate.


  As an improvement of the aluminum oxide vacuum coating machine of the present invention, the plastic substrate is one of PET, CPP and OPP. As an improvement of the aluminum oxide vacuum coating machine of the present invention, the nitrogen delivery mechanism includes a nitrogen delivery pipeline and a first control valve arranged on the nitrogen delivery pipeline, and the nitrogen delivery port of the nitrogen delivery pipeline faces the vaporizer. Plating space settings.


As an improvement of the aluminum oxide vacuum coating machine of the present invention, the oxygen delivery mechanism includes an oxygen delivery pipeline and a second control valve arranged on the oxygen delivery pipeline, and the oxygen delivery port of the oxygen delivery pipeline faces the vaporizer. Plating space settings.


   As an improvement of the aluminum oxide vacuum coating machine of the present invention, the aluminum oxide vacuum coating machine further includes an evaporation boat, the evaporation boat is located under the coating drum, and the aluminum source is placed in the evaporation boat.


  As an improvement of the aluminum oxide vacuum coating machine of the present invention, the evaporation temperature of the evaporation boat is 1700°C to 1800°C, and the coating drum is a low temperature coating drum.


  As an improvement of the aluminum oxide vacuum coating machine of the present invention, the aluminum source is aluminum wire.


Compared with the prior art, the beneficial effect of the present invention is that the aluminum oxide vacuum coating machine of the present invention realizes the vapor deposition of aluminum oxide by providing a nitrogen conveying mechanism and an oxygen conveying mechanism. It has a simple structure and high production efficiency. Advantages, help reduce the cost of coating products.


  detailed description


The present invention will be described in detail below in conjunction with the embodiments shown in the drawings, but it should be noted that these embodiments are not a limitation of the present invention, and those of ordinary skill in the art make functions, methods, or structures based on these embodiments The equivalent transformations or substitutions above fall within the protection scope of the present utility model.


  As shown in Fig. 1, the aluminum oxide vacuum coating machine of the present invention includes: a vacuum box 10, a coating drum 20, a baffle 30, a nitrogen delivery mechanism 40, an oxygen delivery mechanism 50, and an aluminum source 60. The vacuum box 10 is used to form a vacuum coating environment, and the coating drum 20, the baffle 30, the nitrogen delivery mechanism 40, the oxygen delivery mechanism 50 and the aluminum source 60 are located inside the vacuum box 10.


""Wherein, a substrate 1 on which an aluminum oxide plating layer needs to be vapor-deposited is wound around the coating drum 20, and the substrate 1 is a plastic substrate. Specifically, the plastic substrate may be one of PET, CPP and OPP. The baffle 30 is used to make the evaporation material act on the effective position of the coating drum 20 during evaporation to ensure the uniformity of the evaporation. Specifically, the baffles 30 are distributed on both sides of the coating drum 20, and the coating drum 20 partially extends from the space between the baffles 30 on both sides. With this arrangement, the extended portion of the coating drum 20 forms an effective position during vapor deposition, and the substrate 1 thereon contacts the vapor deposition material to achieve vapor deposition. In addition, in order to facilitate the vapor deposition, there is a gap between the coating drum 20 and the side baffles 30, and the size of the gap is larger than that between the substrate 1 wound on the coating drum 20 and the coating on the substrate 1 The sum of thickness.


"The aluminum source 60 is located below the coating drum 20, and the space between the aluminum source 60 and the coating drum 20 forms an evaporation space 2. Preferably, the aluminum source 60 is aluminum wire. In order to evaporate the aluminum source 60, the aluminum oxide vacuum coating machine further includes an evaporation boat 70, the evaporation boat 70 is located under the coating drum 20, and the aluminum source 60 is placed in the evaporation boat 70. Therefore, when the evaporation boat 70 is heated, the aluminum source 60 is heated to evaporate and enter the evaporation space 2. Preferably, the evaporation temperature of the evaporation boat 70 is 1700°C to 1800°C. In addition, in order to prevent the high-temperature evaporation material from damaging the substrate 1 during film coating, the coating drum 20 is a low-temperature coating drum, so that during evaporation, the low-temperature coating drum can achieve instant cooling of the evaporation material, reducing The temperature of the evaporation material.


"The nitrogen conveying mechanism 40 and the oxygen conveying mechanism 50 are used to provide reaction gas, so that the aluminum source 60 reacts with the reaction gas to be converted into alumina for evaporation after evaporation. Specifically, the nitrogen delivery mechanism 40 has a nitrogen delivery port, the oxygen delivery mechanism 50 has an oxygen delivery port, and the nitrogen delivery port and the oxygen delivery port are arranged toward the vapor deposition space 2. Therefore, the gas sources of oxygen and nitrogen are transported to the vapor deposition space 2 through the nitrogen transport mechanism 40 and the oxygen transport mechanism 50 to react.


"" Wherein, the nitrogen delivery mechanism 40 includes a nitrogen delivery pipe 41 and a first control valve 42 arranged on the nitrogen delivery pipe 41, and the nitrogen delivery port of the nitrogen delivery pipe 41 is set toward the evaporation space 2. The first control valve 42 is used to control the flow rate of nitrogen, so that the nitrogen delivery mechanism 40 provides nitrogen that meets the required flow rate. The oxygen delivery mechanism 50 includes an oxygen delivery pipeline 51 and a second control valve 52 disposed on the oxygen delivery pipeline 51, and the oxygen delivery port of the oxygen delivery pipeline 51 is set toward the vapor deposition space 2. The second control valve 52 is used to control the flow rate of oxygen, so that the oxygen delivery mechanism 50 provides oxygen that meets the required flow rate.


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